Creep in piezoelectric scanners of atomic force microscopes

Osamah M. El-Rifai, Kamal Youcef-Toumi. Creep in piezoelectric scanners of atomic force microscopes. In American Control Conference, ACC 2002, Anchorage, Alaska, USA, May 8-10 2002. pages 3777-3782, IEEE, 2002. [doi]

@inproceedings{El-RifaiY02,
  title = {Creep in piezoelectric scanners of atomic force microscopes},
  author = {Osamah M. El-Rifai and Kamal Youcef-Toumi},
  year = {2002},
  doi = {10.1109/ACC.2002.1024515},
  url = {http://dx.doi.org/10.1109/ACC.2002.1024515},
  researchr = {https://researchr.org/publication/El-RifaiY02},
  cites = {0},
  citedby = {0},
  pages = {3777-3782},
  booktitle = {American Control Conference, ACC 2002, Anchorage, Alaska, USA, May 8-10 2002},
  publisher = {IEEE},
  isbn = {0-7803-7298-0},
}