Creep in piezoelectric scanners of atomic force microscopes

Osamah M. El-Rifai, Kamal Youcef-Toumi. Creep in piezoelectric scanners of atomic force microscopes. In American Control Conference, ACC 2002, Anchorage, Alaska, USA, May 8-10 2002. pages 3777-3782, IEEE, 2002. [doi]

Abstract

Abstract is missing.