Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology

Moataz Elkhayat, Stefano Mangiarotti, Marco Grassi, Piero Malcovati, Andrea Fornasari. Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology. In Bruno Andò, Francesco Baldini, Corrado Di Natale, Giovanna Marrazza, Pietro Siciliano, editors, Sensors - Proceedings of the Third National Conference on Sensors, February 23-25, 2016, Rome, Italy. Volume 431 of Lecture Notes in Electrical Engineering, pages 383-387, Springer, 2016. [doi]

@inproceedings{ElkhayatMGMF16,
  title = {Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology},
  author = {Moataz Elkhayat and Stefano Mangiarotti and Marco Grassi and Piero Malcovati and Andrea Fornasari},
  year = {2016},
  doi = {10.1007/978-3-319-55077-0_48},
  url = {https://doi.org/10.1007/978-3-319-55077-0_48},
  researchr = {https://researchr.org/publication/ElkhayatMGMF16},
  cites = {0},
  citedby = {0},
  pages = {383-387},
  booktitle = {Sensors - Proceedings of the Third National Conference on Sensors, February 23-25, 2016, Rome, Italy},
  editor = {Bruno Andò and Francesco Baldini and Corrado Di Natale and Giovanna Marrazza and Pietro Siciliano},
  volume = {431},
  series = {Lecture Notes in Electrical Engineering},
  publisher = {Springer},
  isbn = {978-3-319-55077-0},
}