Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology

Moataz Elkhayat, Stefano Mangiarotti, Marco Grassi, Piero Malcovati, Andrea Fornasari. Capacitance Humidity Micro-sensor with Temperature Controller and Heater Integrated in CMOS Technology. In Bruno Andò, Francesco Baldini, Corrado Di Natale, Giovanna Marrazza, Pietro Siciliano, editors, Sensors - Proceedings of the Third National Conference on Sensors, February 23-25, 2016, Rome, Italy. Volume 431 of Lecture Notes in Electrical Engineering, pages 383-387, Springer, 2016. [doi]

Abstract

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