Ahmed ElSayed, Joerg Schulze. Characterization of thin Boron layers grown on Silicon utilizing molecular beam epitaxy for ultra-shallow pn-junctions. In Karolj Skala, Marko Koricic, Tihana Galinac Grbac, Marina Cicin-Sain, Vlado Sruk, Slobodan Ribaric, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Predrag Pale, Matej Janjic, editors, 41st International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2018, Opatija, Croatia, May 21-25, 2018. pages 7-11, IEEE, 2018. [doi]
Abstract is missing.