Model-based control for semiconductor and advanced materials processing: an overview - researchr publication authors

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Abbas Emami-Naeini, Jon L. Ebert, Robert L. Kosut, Dick de Roover, Sarbajit Ghosal. Model-based control for semiconductor and advanced materials processing: an overview. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 3902-3909, IEEE, 2004. [doi]

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