Abbas Emami-Naeini, Jon L. Ebert, Robert L. Kosut, Dick de Roover, Sarbajit Ghosal. Model-based control for semiconductor and advanced materials processing: an overview. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 3902-3909, IEEE, 2004. [doi]
@inproceedings{Emami-NaeiniEKR04,
title = {Model-based control for semiconductor and advanced materials processing: an overview},
author = {Abbas Emami-Naeini and Jon L. Ebert and Robert L. Kosut and Dick de Roover and Sarbajit Ghosal},
year = {2004},
doi = {10.23919/ACC.2004.1383920},
url = {https://doi.org/10.23919/ACC.2004.1383920},
researchr = {https://researchr.org/publication/Emami-NaeiniEKR04},
cites = {0},
citedby = {0},
pages = {3902-3909},
booktitle = {Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004},
publisher = {IEEE},
isbn = {0-7803-8335-4},
}