Electrical characterization of crystalline Gd::2::O::3:: gate dielectric MOSFETs fabricated by damascene metal gate technology

Ralf Endres, Yordan Stefanov, Udo Schwalke. Electrical characterization of crystalline Gd::2::O::3:: gate dielectric MOSFETs fabricated by damascene metal gate technology. Microelectronics Reliability, 47(4-5):528-531, 2007. [doi]

Abstract

Abstract is missing.