Mohammad Nasr Esfahani, Yusuf Leblebici, B. Erdem Alaca. Piezoresistivity characterization of silicon nanowires through monolithic MEMS. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 77-80, IEEE, 2017. [doi]
Abstract is missing.