Piezoresistivity characterization of silicon nanowires through monolithic MEMS

Mohammad Nasr Esfahani, Yusuf Leblebici, B. Erdem Alaca. Piezoresistivity characterization of silicon nanowires through monolithic MEMS. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 77-80, IEEE, 2017. [doi]

Abstract

Abstract is missing.