Shahabeddin Vamegh Estahbanati, Maher Bakri-Kassem, Rached Dhaouadi. Modeling and characterization of thin film polysilicon in thermally driven MEMS actuators. In IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016, Abu Dhabi, United Arab Emirates, October 16-19, 2016. pages 1-4, IEEE, 2016. [doi]
Abstract is missing.