Integrated opto-mechanical modeling with scene-based metrology techniques for structural dynamics compensation

Eugene Fahnestock, Robert J. Fuentes, Richard Scott Erwin. Integrated opto-mechanical modeling with scene-based metrology techniques for structural dynamics compensation. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 2882-2888, IEEE, 2004. [doi]

Abstract

Abstract is missing.