Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror

Lisa-Marie Faller, Juliana Padilha Leitzke, Hubert Zangl. Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2017, Torino, Italy, May 22-25, 2017. pages 1-6, IEEE, 2017. [doi]

@inproceedings{FallerLZ17,
  title = {Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror},
  author = {Lisa-Marie Faller and Juliana Padilha Leitzke and Hubert Zangl},
  year = {2017},
  doi = {10.1109/I2MTC.2017.7969660},
  url = {https://doi.org/10.1109/I2MTC.2017.7969660},
  researchr = {https://researchr.org/publication/FallerLZ17},
  cites = {0},
  citedby = {0},
  pages = {1-6},
  booktitle = {IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2017, Torino, Italy, May 22-25, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-3596-0},
}