Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror

Lisa-Marie Faller, Juliana Padilha Leitzke, Hubert Zangl. Design of a fast, high-resolution sensor evaluation platform applied to a capacitive position sensor for a micromirror. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2017, Torino, Italy, May 22-25, 2017. pages 1-6, IEEE, 2017. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.