A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing

Shu-Kai S. Fan, Wei-Yu Chen. A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing. Eng. Appl. of AI, 139:109624, 2025. [doi]

Authors

Shu-Kai S. Fan

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Wei-Yu Chen

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