Shu-Kai S. Fan, Wei-Yu Chen. A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing. Eng. Appl. of AI, 139:109624, 2025. [doi]
@article{FanC25,
title = {A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing},
author = {Shu-Kai S. Fan and Wei-Yu Chen},
year = {2025},
doi = {10.1016/j.engappai.2024.109624},
url = {https://doi.org/10.1016/j.engappai.2024.109624},
researchr = {https://researchr.org/publication/FanC25},
cites = {0},
citedby = {0},
journal = {Eng. Appl. of AI},
volume = {139},
pages = {109624},
}