A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing

Shu-Kai S. Fan, Wei-Yu Chen. A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing. Eng. Appl. of AI, 139:109624, 2025. [doi]

@article{FanC25,
  title = {A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing},
  author = {Shu-Kai S. Fan and Wei-Yu Chen},
  year = {2025},
  doi = {10.1016/j.engappai.2024.109624},
  url = {https://doi.org/10.1016/j.engappai.2024.109624},
  researchr = {https://researchr.org/publication/FanC25},
  cites = {0},
  citedby = {0},
  journal = {Eng. Appl. of AI},
  volume = {139},
  pages = {109624},
}