Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes

Shu-Kai S. Fan, Chia-Yu Hsu, Chih-Hung Jen, Kuan-Lung Chen, Li-Ting Juan. Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes. AI in Engineering, 46:101166, 2020. [doi]

Abstract

Abstract is missing.