Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Mabel C. Chou, Chih-Hung Jen, Jen-Hsuan Tsou. Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing. IEEE T. Automation Science and Engineering, 19(3):1530-1541, 2022. [doi]
@article{FanHTCJT22,
title = {Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing},
author = {Shu-Kai S. Fan and Chia-Yu Hsu and Du-Ming Tsai and Mabel C. Chou and Chih-Hung Jen and Jen-Hsuan Tsou},
year = {2022},
doi = {10.1109/TASE.2022.3141426},
url = {https://doi.org/10.1109/TASE.2022.3141426},
researchr = {https://researchr.org/publication/FanHTCJT22},
cites = {0},
citedby = {0},
journal = {IEEE T. Automation Science and Engineering},
volume = {19},
number = {3},
pages = {1530-1541},
}