Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing

Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Mabel C. Chou, Chih-Hung Jen, Jen-Hsuan Tsou. Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing. IEEE T. Automation Science and Engineering, 19(3):1530-1541, 2022. [doi]

Abstract

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