Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Fei He, Chun-Chung Cheng. Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing. IEEE T. Automation Science and Engineering, 17(4):1925-1936, 2020. [doi]