Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Fei He, Chun-Chung Cheng. Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing. IEEE T. Automation Science and Engineering, 17(4):1925-1936, 2020. [doi]
@article{FanHTHC20,
title = {Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing},
author = {Shu-Kai S. Fan and Chia-Yu Hsu and Du-Ming Tsai and Fei He and Chun-Chung Cheng},
year = {2020},
doi = {10.1109/TASE.2020.2983061},
url = {https://doi.org/10.1109/TASE.2020.2983061},
researchr = {https://researchr.org/publication/FanHTHC20},
cites = {0},
citedby = {0},
journal = {IEEE T. Automation Science and Engineering},
volume = {17},
number = {4},
pages = {1925-1936},
}