IDM-Assisted Capacitive Displacement Sensor for Large-Range, High-Precision Positioning Systems

Kai Fan, Ruiqi Shi, Zhihua Feng. IDM-Assisted Capacitive Displacement Sensor for Large-Range, High-Precision Positioning Systems. IEEE Transactions on Industrial Electronics, 71(7):8047-8057, 2024. [doi]

Authors

Kai Fan

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Ruiqi Shi

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Zhihua Feng

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