IDM-Assisted Capacitive Displacement Sensor for Large-Range, High-Precision Positioning Systems

Kai Fan, Ruiqi Shi, Zhihua Feng. IDM-Assisted Capacitive Displacement Sensor for Large-Range, High-Precision Positioning Systems. IEEE Transactions on Industrial Electronics, 71(7):8047-8057, 2024. [doi]

Abstract

Abstract is missing.