Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature

Shuyao Fan, Wen Wang, Xueling Li, Yana Jia, Yuan Sun, Mengwei Liu. Optimization of AIN Composite Structure Based Surface Acoustic Wave Device for Potential Sensing at Extremely High Temperature. Sensors, 20(15):4160, 2020. [doi]

Abstract

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