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Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang. Stitch-aware routing for multiple e-beam lithography. In The 50th Annual Design Automation Conference 2013, DAC '13, Austin, TX, USA, May 29 - June 07, 2013. pages 25, ACM, 2013. [doi]
Abstract is missing.