Shao-Yun Fang, Yi-Shu Tai, Yao-Wen Chang. Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning. In The 20th Asia and South Pacific Design Automation Conference, ASP-DAC 2015, Chiba, Japan, January 19-22, 2015. pages 671-676, IEEE, 2015. [doi]
Abstract is missing.