Shao-Yun Fang, Kuo-Hao Wu. Guiding Template-Induced Design Challenges in DSA-MP Lithography. In 2018 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2018, Hong Kong, China, July 8-11, 2018. pages 500-502, IEEE Computer Society, 2018. [doi]
@inproceedings{FangW18-1,
title = {Guiding Template-Induced Design Challenges in DSA-MP Lithography},
author = {Shao-Yun Fang and Kuo-Hao Wu},
year = {2018},
doi = {10.1109/ISVLSI.2018.00097},
url = {http://doi.ieeecomputersociety.org/10.1109/ISVLSI.2018.00097},
researchr = {https://researchr.org/publication/FangW18-1},
cites = {0},
citedby = {0},
pages = {500-502},
booktitle = {2018 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2018, Hong Kong, China, July 8-11, 2018},
publisher = {IEEE Computer Society},
isbn = {978-1-5386-7099-6},
}