Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications

Xudong Fang, Chen Wu, Xin Guo, Libo Zhao, Yulong Zhao, Zhuangde Jiang. Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 105-109, IEEE, 2019. [doi]

@inproceedings{FangWGZZJ19,
  title = {Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature Applications},
  author = {Xudong Fang and Chen Wu and Xin Guo and Libo Zhao and Yulong Zhao and Zhuangde Jiang},
  year = {2019},
  doi = {10.1109/NEMS.2019.8915652},
  url = {https://doi.org/10.1109/NEMS.2019.8915652},
  researchr = {https://researchr.org/publication/FangWGZZJ19},
  cites = {0},
  citedby = {0},
  pages = {105-109},
  booktitle = {14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019},
  publisher = {IEEE},
  isbn = {978-1-7281-1629-7},
}