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High performance MEMS spiral inductors

Dong-Ming Fang, Quan Yuan, Xiuhan Li, Hai-Xia Zhang, Yong Zhou, Xiao-Lin Zhao. High performance MEMS spiral inductors. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1033-1035, IEEE, 2010. [doi]

Authors

Dong-Ming Fang

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Quan Yuan

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Xiuhan Li

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Hai-Xia Zhang

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Yong Zhou

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Xiao-Lin Zhao

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