Dong-Ming Fang, Quan Yuan, Xiuhan Li, Hai-Xia Zhang, Yong Zhou, Xiao-Lin Zhao. High performance MEMS spiral inductors. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1033-1035, IEEE, 2010. [doi]
Abstract is missing.