Kanouni Fares, Amara Saad, Farouk Laidoudi. Thin film bulk acoustic resonators based on c-axis tilted yttrium-doped AlN for Viscosity sensors. In 19th International Multi-Conference on Systems, Signals & Devices, SSD 2022, Sétif, Algeria, May 6-10, 2022. pages 1715-1720, IEEE, 2022. [doi]
Abstract is missing.