Sergej Fatikow, Volkmar Eichhorn, Malte Bartenwerfer, Florian Krohs. Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials. In Proceedings of 2013 IEEE 18th Conference on Emerging Technologies & Factory Automation, ETFA 2013, Cagliari, Italy, September 10-13, 2013. pages 1-4, IEEE, 2013. [doi]
Abstract is missing.