Sitao Fei, Hao Ren. A Contour Mode AIN Piezoelectric Resonator based on SOI Substrate. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 180-183, IEEE, 2020. [doi]
Abstract is missing.