On-wafer probe station for microwave metrology at the nanoscale

Abdelhatif El Fellahi, Kamel Haddadi, J. Marzouk, S. Arscott, C. Boyaval, Tuami Lasri, Gilles Dambrine. On-wafer probe station for microwave metrology at the nanoscale. In 2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings, Pisa, Italy, May 11-14, 2015. pages 1960-1964, IEEE, 2015. [doi]

Abstract

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