Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

Guo-Hua Feng, Wen-Sheng Chen. Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity. Sensors, 22(19):7471, 2022. [doi]

Abstract

Abstract is missing.