Zhengyuan Feng, Xiaoliang Hu, Zengguo Tian, Baozhu Jiang, Hongshuai Zhang, Wanli Zhang. Bi-LSTM-Based Dynamic Prediction Model for Pulling Speed of Czochralski Single-Crystal Furnace. J. Comput. Inf. Sci. Eng., 23(4), August 2023. [doi]
Abstract is missing.