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Statistical nature of hard breakdown recovery in high-κ dielectric stacks studied using ramped voltage stress

Xuan Feng, Nagarajan Raghavan, Sen Mei, Shurong Dong, Kin Leong Pey, Hei Wong. Statistical nature of hard breakdown recovery in high-κ dielectric stacks studied using ramped voltage stress. Microelectronics Reliability, 88:164-168, 2018. [doi]

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