Experiments on the Release of CMOS-Micromachined Metal Layers

Daniel Fernández, Jordi Ricart, Jordi Madrenas. Experiments on the Release of CMOS-Micromachined Metal Layers. J. Sensors, 2010, 2010. [doi]

Authors

Daniel Fernández

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Jordi Ricart

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Jordi Madrenas

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