Daniel Fernández, Jordi Ricart, Jordi Madrenas. Experiments on the Release of CMOS-Micromachined Metal Layers. J. Sensors, 2010, 2010. [doi]
@article{FernandezRM10,
title = {Experiments on the Release of CMOS-Micromachined Metal Layers},
author = {Daniel Fernández and Jordi Ricart and Jordi Madrenas},
year = {2010},
doi = {10.1155/2010/937301},
url = {http://dx.doi.org/10.1155/2010/937301},
researchr = {https://researchr.org/publication/FernandezRM10},
cites = {0},
citedby = {0},
journal = {J. Sensors},
volume = {2010},
}