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FinFET and MOSFET preliminary comparison of gate oxide reliability

R. Fernández, R. Rodríguez, M. Nafría, X. Aymerich, Ben Kaczer, Guido Groeseneken. FinFET and MOSFET preliminary comparison of gate oxide reliability. Microelectronics Reliability, 46(9-11):1608-1611, 2006. [doi]

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R. Fernández

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R. Rodríguez

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M. Nafría

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X. Aymerich

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Ben Kaczer

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Guido Groeseneken

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