Polysilicon Fatigue Test-Bed Monitoring Based on the 2nd Harmonic of the Device Current Measurement

E. Ferraris, B. De Masi, M. Del Sarto. Polysilicon Fatigue Test-Bed Monitoring Based on the 2nd Harmonic of the Device Current Measurement. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 55-60, IEEE Computer Society, 2005. [doi]

Abstract

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