Microscopic aspects of defect generation in SiO::2::

Ruggero Feruglio, Fernanda Irrera, Bruno Riccò. Microscopic aspects of defect generation in SiO::2::. Microelectronics Reliability, 42(9-11):1427-1432, 2002. [doi]

Authors

Ruggero Feruglio

This author has not been identified. Look up 'Ruggero Feruglio' in Google

Fernanda Irrera

This author has not been identified. Look up 'Fernanda Irrera' in Google

Bruno Riccò

This author has not been identified. Look up 'Bruno Riccò' in Google