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2 plasma etching of silicon nitride thin films

Baris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar. 2 plasma etching of silicon nitride thin films. In American Control Conference, ACC 2001, Arlington, VA, USA, 25-27 June, 2001. pages 1280-1285, IEEE, 2001. [doi]

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Baris Fidan

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I. G. Rosen

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Tyler Parent

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Anupam Madhukar

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