Tyler Parent - researchr alias

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Viewing Publication 1 - 5 from 5

2002

An Elementary Model for Control of a Semiconductor Etching ProcessAnupam Madhukar, Tyler Parent, I. Gary Rosen, Chunming Wang. siamrev, 44(4):678-695, 2002. [doi]

Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensingI. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar. tcst, 10(1):64-75, 2002. [doi]

2001

2 plasma etching of silicon nitride thin filmsBaris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar. amcc 2001: 1280-1285 [doi]

A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin filmsI. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar. tcst, 9(2):271-284, 2001. [doi]

2000

2 plasma etching of silicon nitrideBaris Fidan, Tyler Parent, I. G. Rosen, Anupam Madhukar. amcc 2000: 4006-4010 [doi]

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