Investigation of Predictive Maintenance for Semiconductor Manufacturing and its Impacts on the Supply Chain - researchr publication authors

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Daniel Fischer, Patrick Moder, Hans Ehm. Investigation of Predictive Maintenance for Semiconductor Manufacturing and its Impacts on the Supply Chain. In 22nd IEEE International Conference on Industrial Technology, ICIT 2021, Valencia, Spain, March 10-12, 2021. pages 1409-1416, IEEE, 2021. [doi]

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