Gilberto Flores, Gema A. Mercado, John A. Pelesko. Dynamics and Touchdown in Electrostatic MEMS. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 182-187, IEEE Computer Society, 2003. [doi]
@inproceedings{FloresMP03,
title = {Dynamics and Touchdown in Electrostatic MEMS},
author = {Gilberto Flores and Gema A. Mercado and John A. Pelesko},
year = {2003},
url = {http://csdl.computer.org/comp/proceedings/icmens/2003/1947/00/19470182abs.htm},
researchr = {https://researchr.org/publication/FloresMP03},
cites = {0},
citedby = {0},
pages = {182-187},
booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada},
publisher = {IEEE Computer Society},
isbn = {0-7695-1947-4},
}