Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring

M. Gaffney Flynn, Roy S. Smith, Patrick Abraham, Steven DenBaars. Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring. IEEE Trans. Contr. Sys. Techn., 9(5):728-740, 2001. [doi]

Abstract

Abstract is missing.