Lo Ming Fok, Yun-Hui Liu, Wen J. Li. Modeling of Haptic Sensing of Nanolithography with an Atomic Force Microscope. In Proceedings of the 2005 IEEE International Conference on Robotics and Automation, ICRA 2005, April 18-22, 2005, Barcelona, Spain. pages 2446-2451, IEEE, 2005.
Abstract is missing.