A Semi-analytical Model for Interconnect Open Defects in FinFET Logic Cells

Freddy Forero, Jean Marc Gallière, Michel Renovell, Víctor H. Champac. A Semi-analytical Model for Interconnect Open Defects in FinFET Logic Cells. In IEEE Latin American Test Symposium, LATS 2019, Santiago, Chile, March 11-13, 2019. pages 1-6, IEEE, 2019. [doi]

Abstract

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