Operational Modeling and Simulation in Semiconductor Manufacturing

John W. Fowler, Michael C. Fu, Lee Schruben, Steven Brown, Frank Chance, Sean Cunningham, Courtland Hilton, Mani Janakiram, Richard Stafford, James Hutchby. Operational Modeling and Simulation in Semiconductor Manufacturing. In Winter Simulation Conference. pages 1035, 1998. [doi]

Abstract

Abstract is missing.