Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range

Paolo Frigerio, Luca Molinari, Andrea Barbieri, Marco Zamprogno, Gianluca Mendicino, Nicoló Boni, Giacomo Langfelder. Nested Closed-Loop Control of Quasi-Static MEMS Scanners With Large Dynamic Range. IEEE Transactions on Industrial Electronics, 70(4):4217-4225, 2023. [doi]

Abstract

Abstract is missing.